화학공학소재연구정보센터
Materials Science Forum, Vol.353-356, 15-19, 2001
Defect reduction in sublimation grown silicon carbide crystals by adjustment of thermal boundary conditions
The influence of changes to the crystal growth system was examined by an experimental verification of results from numerical simulation. From elementary tests correlation between growth defects and thermal boundary conditions was established. A significant improvement of crystal quality was achieved by a conversion of the results to the standard growth process.