화학공학소재연구정보센터
Materials Science Forum, Vol.353-356, 147-150, 2001
SiC polytype transformation on the growth surface
The effect of the growth conditions on the polytype formation in epitaxial SiC layers grown on vicinal and singular surfaces by the sublimation method has been studied by a real color cathodoluminescence SEM technique. A polytype growth instability is observed on a singular surface. The clusters of native defects, spontaneously appearing on the growth surface are proposed to be the nucleation centers for new polytypes.