화학공학소재연구정보센터
Materials Science Forum, Vol.353-356, 303-306, 2001
A simple non-destructive technique to detect micropipes in silicon carbide
An initial investigation has shown that the electrolysis of water can occur preferentially at macroscopic defects, including micropipes, where a silicon carbide wafer is used as the anode. It is proposed that observing the location of the resulting streams of bubbles, nucleated at the defects, would form the basis for a simple, non-destructive qualification test of SiC wafers.