화학공학소재연구정보센터
Materials Science Forum, Vol.353-356, 393-396, 2001
Defects characterization in SiC by scanning photoluminescence spectroscopy
Integrated and spectrally resolved Ph scanning was investigated in 6H-SiC epitaxial layers under a laser excitation with a photon energy of about 5.08 eV. Highly spatial resolved measurements revealed the presence of microscopic pattern (5-20 mum) where the integrated PL intensity increases. We suggest that the gettering effect of dislocations trough their strain field is responsible for these microscopic intensity variations. Spectrally resolved PL mappings shows an enhancement of the near band edge peak intensity and width which confirm the presence of a denuded zone in the neighbourhood of the dislocation.