This contribution deals with the systematic investigation of different surface finishes (electropolished, polished, ground, sandblasted) on the oxidation behaviour of chromium steels. The specimens were oxidized in a H-2-2.5%H2O atmosphere at 872 K for I h to 100 h. Depth profiles were recorded by secondary neutral mass spectrometry (SNMS) to determine the elemental composition of the oxide scale and the diffusion profiles below the scale. The surface finish was found to influence both the thickness of the oxide scale and the depletion of the selectively oxidized elements. In the case of austenitic steels also the composition of the oxide scale is dependent on the surface finish: Electropolished samples oxidized for 100 hours exhibit an iron and nickel-rich oxide film, whereas on polished, ground and sandblasted specimens chromium and manganese-rich scales are found.