화학공학소재연구정보센터
Materials Science Forum, Vol.389-3, 207-210, 2002
Aluminum incorporation into 4H-SiC layers during epitaxial growth in a hot-wall CVD system
Experimental results are presented for aluminium incorporation in Si-face 4H-SiC epilayers grown in a hot-wall reactor by chemical vapour deposition (CVD). Epitaxial growth was performed using silane and propane as process gases, and trimethylaluminium (TMA) as the doping source. The incorporation of aluminium has been studied in the concentration range from 3 x 10(14) cm(-3) to 2 x 10(18) cm(-3). In addition, the influence of growth rate on the carrier concentration in the epilayers is studied.