Materials Science Forum, Vol.389-3, 1297-1300, 2002
Electroluminescence analysis of Al+ and B+ implanted pn diodes
We report on the electroluminescence (EL) measured for forward biased 4H SiC pn diodes formed by Al+ or B+ implantation into n-type epitaxial layers. We have measured EL spectra for these pn diodes with high and low leakage currents. Diodes with low leakage current showed a steep increase in 390nm peak with current injection compared to those from donor acceptor pair (DAP) or defect related recombination, whereas the diode with high leakage current showed a relatively slow increase in 390nm peak. We found the correlation between high leakage current and small "free to bound" EL peak.
Keywords:electroluminescence;pn diodes