Materials Science Forum, Vol.389-3, 1431-1434, 2002
Demonstration of 4H-SiC avalanche photodiode linear array
Visible blind 4H-SiC avalanche photodiode linear arrays have been fabricated. The reverse I-V characteristics were measured. The uniformity of the breakdown voltage and the leakage current at 95% of breakdown were studied. An array with 40 APD pixels containing only one bad pixel is demonstrated.