Materials Science Forum, Vol.414-4, 127-132, 2003
Properties of high-density amorphous carbon films deposited by laser ablation
The properties of carbon films deposited by high intensity pulsed Nd:Glass laser are reported. Different measurements like TEM, SIMS, EELS, XPS and AFM showed the formation of a high-density amorphous carbon layer with good protection against chemically aggressive alkaline solutions. We demonstrated that instead of excimer lasers, Nd-based solid state lasers can be used successfully for preparation of high quality amorphous carbon films.
Keywords:pulsed laser deposition (PLD);diamond-like carbon (DLC);graphite-like carbon (GLC);chemically protective layer