화학공학소재연구정보센터
Materials Science Forum, Vol.423-4, 529-533, 2003
Formation kinetics and properties of CrNx/H13 functionally graded coating fabricated by PVD
The traditional physical vapor deposition could only get coating with homogeneous component and this restricted the further increase of integer properties. CrNx coatings, Cr-N of various stoichimetries, were deposited on AISI H13 steel to improve the hardness and electrochemical properties. And a new CrNx/H13 functionally graded coating (FGC) was fabricated on H13 steel substrate by PVD. The component, structure and formation of graded CrNx coating were mainly controlled by the formation kinetics. Specimens under different conditions were prepared with bias voltage of -200 V, substrate temperature below 300degreesC, and nitrogen partial pressure from 0.05 to 2 Pa. The relationship of microstructure and properties was studied, and a kinetics model of graded CrNx coating was constituted. The microstructure and crystallinity of chromium nitride have been investigated using X-ray diffraction, X-ray Electrical Spectrum. The electrochemical property was carried out by Zahner IM6e electrochemical workstation, and the surface status was detected by scanning electron microscopy. The electrochemical, microhardness and thermal shock experiment results showed that the graded coating have a better performance than duplex CrN coating.