The tetrahedral amorphous carbon films are attracting materials because of their proper-ties similar to diamond, such as high hardness, resistivity, optical transparency, chemical inertness and low coefficient of friction. These properties make it ideal for wear resistance application on cutting tools, automotive component, aerospace components and orthopedic prosthesis etc. In this paper the structures, mechanical properties adhesion and wear resistance of the tetrahedral amorphous carbon films deposited on silicon, Cr18Ni9 stainless steel and high speed steel and M2 steel substrate by pulsed and direct current filtered catholic vacuum arc deposition system have been investigated. The high quality tetrahedral amorphous carbon film has been obtained. The hardness and elastic modulus of the tetrahedral amorphous carbon films higher than 78Gpa and 435Gpa respectively determined by nano indentation tests. The friction performance of the tetrahedral amorphous carbon films was also studied by SRV tests, the results show: the tetrahedral amorphous carbon films have much lower wear coefficient and wear rate than that of silicon, stainless steel and high speed steel substrate.