화학공학소재연구정보센터
Materials Science Forum, Vol.433-4, 29-32, 2002
Growth of faceted free-spreading SiC bulk crystals by sublimation
We report on a new method of free-spreading SiC bulk crystal growth by sublimation, where the crystal is kept out of touch with the crucible side wall and SiC polycrystalline deposits. The free-spreading SiC tends to form a crystal of pronounced hexagonal shape during the growth. The 6H- and 4H-SiC crystals up to 35 mm in diameter with the quality comparable or better than that of the Lely crystals are obtained. The growth conditions favorable for the free-spreading crystal growth are discussed. Different efficiencies of donor (N) and acceptor (Al) incorporation are observed on singular facets.