Materials Science Forum, Vol.433-4, 111-114, 2002
Crystal interface shape simulation during SiC sublimation growth
For the SiC sublimation growth a numerical model of heat transfer in the whole furnace and mass transport in the vapour phase is used in order to compute the history of the crystal interface shape by a series of stationary computations. The semi-transparency of the crystal is considered by adding the basic Rosseland term to the phonon heat conductivity. Growth velocity and interface shape meet experimental experience.
Keywords:crystal-vapor interface;global heat;mass transfer;numerical modeling;SiC;sublimation growth