The requirement and importance of metals and ceramics are increasing to microsystem in reproduction and molding techniques because of the mechanical and physical properties. In this study, a non-equilibrium PM processing such as an MA/SPS process is examined in a Ti-20 mass% SiC as well as in a Ti-20 mass% Si3N4 materials systems. We also apply the MA/SPS PM process to produce micro-parts made of ceramic composites. As a result of compression-test and TEM observations, unusual high temperature deformation effects such as low flow stress at low deformation temperatures or at the high initial strain rates were observed in the SPS compacts. Such an unusual deformation behavior is attributed to a pseud-superplasticity in the material, in which the phase transition of metastable microstructure occurs during the deformation. The MA/SPS process was able to apply to a Ni mold LIGA process. Optimization of the pseud-superplasticity enables to fabricate molds made of fine ceramics composites such as TiN/Ti5Si3 or TiC/Ti5Si3.