The tensile deformation behavior of M963 superalloy treated by various heat treatments has been studied at both room and high temperature (1173K). The result shows that the alloy treated by the standard solution treatment at 1483K for 4h followed by air-cooling has low ductility especially at 1173K. The additional aging treatment at 1123K for 16h followed by furnace cooling can recover the ductility of the alloy at 1173K, but further decrease its room temperature ductility. The TEM observation shows that the deformation mechanism varied with both the testing temperature and heat treatment. Finally, the mechanism of the aging treatment on the deformation behavior of the M963 superalloy is discussed.