A laser-induced process for the synthesis of ultrafine TiO2 powders starting from liquid precursors has been developed using cw CO2 laser as an excitation Source. This work is mainly concerned with the evaluation of the role of the main process parameters in powder composition, reaction efficiency and production rate. These parameters strongly influence and change the reaction temperature, which affects the size, stoichiometry and crystallinity of the powder particles. The powder composition was investigated using IR reflection and Raman spectroscopy methods and the particle size was determined by SEM method.