Flash Lamp Supported Deposition of 3C-SiC (FLASiC) - a promising technique to produce high quality cubic SiC layers

Skorupa W; Panknin D; Anwand W; Voelskow M; Ferro G; Monteil Y; Leycuras A; Pezoldt J; McMahon R; Smith M; Camassel J; Stoemenos J; Polychroniadis E; Godignon P; Mestres N; Turover D; Rushworth S; Friedberger A

Materials Science Forum, Vol.457-460, 175-180, 2004

Skorupa W, Panknin D, Anwand W, Voelskow M, Ferro G, Monteil Y, Leycuras A, Pezoldt J, McMahon R, Smith M, Camassel J, Stoemenos J, Polychroniadis E, Godignon P, Mestres N, Turover D, Rushworth S, Friedberger A

This paper summarises latest advancements regarding FLASiC (Flash lamp supported deposition of 3C-SiC) as a new approach to produce high quality SiC-Si heteroepitaxial material. This concerns description of the process and equipment, microstructural results and modelling aspects. In this manner a new era of nanoscale liquid phase epitaxy could be born.

Keywords:3C-SiC;flash lamp annealing;nanoscale epitaxy;microstructure;modelling