화학공학소재연구정보센터
Materials Science Forum, Vol.457-460, 343-346, 2004
TEM observations of 4H-SiC deformed at room temperature and 150 degrees C
4H-SiC single crystals have been deformed under 5 GPa at room temperature and 150degreesC using an anisotropic multi-anvil apparatus. Transmission Electron Microscopy observations show that the microstructure is composed of widely dissociated dislocations and perfect dislocations. The generation of such perfect dislocations could indicate that silicon carbide exhibits a change in deformation mechanism under very high stress, with a behavior similar to Si and III-V compounds.