Materials Science Forum, Vol.457-460, 561-564, 2004
Further investigation of silicon vacancy-related luminescence in 4H and 6H SiC
The photoluminescence signatures of silicon vacancies in 4H and 6H SiC have been re-examined, comparing the results obtained by near-threshold electron irradiation (300 keV) with those obtained at 1 MeV. Annealing experiments have been performed to investigate the temperatures at which the signatures are lost in n- and p-type material.