Materials Science Forum, Vol.457-460, 727-730, 2004
Growth of phosphorous-doped n-type 6H-SiC crystals using a modified PVT technique and phosphine as source
In this paper we report bulk SiC doping with phosphorous by the modified physical vapor transport (M-PVT) method using phosphine as source. Near infrared absorption mapping was carried out on longitudinal cuts of the SiC crystals in order to verify phosphorous doping. The phosphorous concentration determined by the way of glow discharge mass spectroscopy (GDMS) measurements was up to N-D = 1.8 (.) 10(17)cm(-3).