화학공학소재연구정보센터
Materials Science Forum, Vol.457-460, 1373-1376, 2004
Development of sol-gel MgO thin films for SiC insulation applications
Magnesium oxide (MgO) thin films have been studied as an alternative dielectric to silicon dioxide (SiO2) for SiC insulation applications. Thin MgO films have been deposited onto Pt/Si substrate, using sol-gel coating process. Theta-2theta X-ray diffraction patterns of the films show a [I I I] preferential orientation. MIM structures have been elaborated to characterize the electrical properties of the sol-gel MgO films. Current-Voltage characteristics of these structures have been measured between 150degreesC and 250degreesC. The first IN curves show two conduction regimes: an ohmic-like regime at low electrical fields (E<0.3MV/cm), and a Schottky-type regime at higher electrical fields (E>0.3MV/cm). Zero-field potential barrier heights of the order of I eV have been estimated.