화학공학소재연구정보센터
Materials Science Forum, Vol.457-460, 1471-1474, 2004
Porous structure of anodized p-type 6H SiC
Porous silicon carbide is obtained from p-type 6H SiC wafers by electrochemical etching in hydrofluoric aqueous electrolyte. The porous structures are studied depending on wafer polarity and the applied current density. The porosity is estimated from the SEM images as well as from charge transfer calculations.