Materials Science Forum, Vol.457-460, 1601-1604, 2004
X-ray diffraction imaging of GaN-based heterostructures on SiC
X-ray topography or diffraction imaging comprises a family of techniques employed to study semiconductor materials. This study assesses and compares three variants of diffraction imaging: double crystal x-ray topography, Lang x-ray topography, and a new technique known as Bedescan(TM) applied to alpha-SiC substrates and wurtzite GaN heteroepitaxial layers.