Yttrium implantation effects on reference steels (extra low carbon and low manganese steel) were studied by Rutherford Backscattering Spectrometry (RIBS), Reflection High Energy Electron Diffraction (RHEED), X-ray Diffraction (XRD) and Glancing Angle X-ray Diffraction (GAXRD). Thermogravimetry and in situ X-Ray Diffraction at 700degreesC and P-O2=0.04 Pa for 24h were used to determine the yttrium implantation and addition element effects on sample oxidation resistance at high temperatures. This study clearly shows that yttrium implantation and subsequent high temperature oxidation induced the formation of several yttrium mixed oxides which closely depend on the reference steel addition elements. Moreover, these yttrium mixed oxides seem to be responsible for the improved reference steel oxidation resistance at high temperatures.