In this paper, the optical properties and structure of CdS films were investigated by SEM, X-ray diffraction, and x-ray photoelectron spectroscopy. The CdS films in this study were deposited on the plane transparent glass by chemical bath deposition technique. The experimental results have shown that the annealing treatment has an important effect on the optical properties and structure of CdS films. This may be ascribed to decreasing surface contaminations and oxide content in the films.