화학공학소재연구정보센터
Materials Science Forum, Vol.483, 261-264, 2005
Optical spectroscopy as a tool for observation of porous SiC graphitization
We have studied effects of thermal treatment in vacuum and wet oxidation on the optical transmission of SiC samples with porous layer on the Si face in the visible and near infrared spectral range. An analysis of changes in the absorption coefficient shows that the process of graphitization in vacuum begins at a temperature below 700° C and can be observed at wet oxidation at 1000° C.