Previous Article Next Article Table of Contents Materials Science Forum, Vol.490-491, 583-588, 2005 Export Citation Residual stress effects on Raman spectra of RuO2 thin films Meng LJ, Silva R, Cui HN, Teixeira V, dos Santos MP Keywords:residual stress;Raman scattering;thin film;RuO2;sputtering Please enable JavaScript to view the comments powered by Disqus.
