Low temperature dislocation- and point defect-related anelasticity in high pressure torsion (HPT) deformed metallic materials bcc Fe-26Al, fcc Fe-36Ni, hcp Ti is studied by mechanical spectroscopy. Internal friction (IF) peaks, which correspond to these phenomena, have different stability against heating. Up to five IF peaks are recorded, at least some of these peaks can be classify as Hasiguti peaks. Mechanical spectroscopy gives a useful tool to study early stages of severely plastic deformed alloys study.