In this work, we propose a systematic methodology to calibrate hydrodynamic models against Monte Carlo simulation. Two channel materials (GaAs and Ge) are used to demonstrate the calibration procedure and good fitting of the entire transfer and output characteristics curves is obtained. Further, this approach is scalable to different device dimensions (both channel length and body thickness) with reasonable device integrity. This work facilitates an accurate and time-efficient hydrodynamic simulation in quasi-ballistic regime for device design and optimization. (c) 2013 Elsevier Ltd. All rights reserved.