The Preparation of Yttrium Oxide Film Deposited by Electrochemical Method

Jaeyoung Lee; Yongsug Tak

Journal of Industrial and Engineering Chemistry, Vol.5, No.2, 139-142, June, 1999

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The Preparation of Yttrium Oxide Film Deposited by Electrochemical Method

Jaeyoung Lee, and Yongsug Tak^†

Department of Chemical Engineering, Inha University, Inchon 402-751, Korea

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Yttrium oxide films were prepared on indium-tin-oxide (ITO) by electrochemical method followed by heat treatment. During electrochemical reduction, a thin film of yttrium hydroxide was initially formed and vertically oriented growth bands were developed. Structural and morphological changes occurring during the deposition and dehydration of yttrium hydroxides were investigated by use of XRD, SEM and TG/DTA. The extent of dehydration increased with temperature. Y(OH)₃ phase transformed to α-Y(OH)₃ at about 400 ℃, and then Y₂O₃ above 450 ℃.

Keywords:yttrium oxide;yttrium hydroxide;electrochemical preparation;EQCM;dehydration

[References]

Sharma RN, Rastogi AC, J. Appl. Phys., 74, 6691 (1993)
Polman A, J. Appl. Phys., 82, 1 (1997)
Gurvitch M, Manchanda L, Gibson JM, Appl. Phys. Lett., 51 (1987)
Thomas G, Prasad S, Nerz JE, U.S. Patent, 5,392,191 (1995)
Zhang S, Ziao R, J. Appl. Phys., 83, 3842 (1998)
Onisawa K, Fuyama M, Tamura K, Taguchi K, Nakayama T, Ono YA, J. Appl. Phys., 68, 719 (1990)
Switzer JA, J. Electrochem. Soc., 133, 722 (1986)
Golden TD, Shumsky MG, Zhou Y, Vanderwerf RA, Van Leeuwen RA, Switzer JA, Chem. Mater., 8, 2499 (1996)
Izaki M, Omi T, J. Electrochem. Soc., 143(3), L53 (1996)
Lee J, Tak Y, Mat. Res. Soc. Symp. Proc., 495, 457 (1998)
Zhitomirsky I, Gal-Or L, Mater. Lett., 31, 155 (1997)
Natarajan C, Matsumoto H, Nogami G, J. Electrochem. Soc., 144(1), 121 (1997)
Gal-Or L, Silberman I, Chaim R, J. Electrochem. Soc., 138, 1939 (1991)
Atkins PW, General Chemistry, p. 927, W.H. Freeman and Company, New York (1989)
Deakin MR, Buttry DA, Anal. Chem., 61, 1147 (1989)
Zhitomirsky I, Kohn A, Gal-Or L, Mater. Lett., 25, 223 (1995)
Nyquist RA, Kagel RO, Handbook of Infrared and Raman Spectra of Inorganic Compounds and Organic Salts, Vol. 4, p. 223, Academic Press, Tokyo (1997)

[Referenced By]

[Related Articles]

[1] Sharma RN, Rastogi AC, J. Appl. Phys., 74, 6691 (1993)

[2] Polman A, J. Appl. Phys., 82, 1 (1997)

[3] Gurvitch M, Manchanda L, Gibson JM, Appl. Phys. Lett., 51 (1987)

[4] Thomas G, Prasad S, Nerz JE, U.S. Patent, 5,392,191 (1995)

[5] Zhang S, Ziao R, J. Appl. Phys., 83, 3842 (1998)

[6] Onisawa K, Fuyama M, Tamura K, Taguchi K, Nakayama T, Ono YA, J. Appl. Phys., 68, 719 (1990)

[7] Switzer JA, J. Electrochem. Soc., 133, 722 (1986)

[8] Golden TD, Shumsky MG, Zhou Y, Vanderwerf RA, Van Leeuwen RA, Switzer JA, Chem. Mater., 8, 2499 (1996)

[9] Izaki M, Omi T, J. Electrochem. Soc., 143(3), L53 (1996)

[10] Lee J, Tak Y, Mat. Res. Soc. Symp. Proc., 495, 457 (1998)

[11] Zhitomirsky I, Gal-Or L, Mater. Lett., 31, 155 (1997)

[12] Natarajan C, Matsumoto H, Nogami G, J. Electrochem. Soc., 144(1), 121 (1997)

[13] Gal-Or L, Silberman I, Chaim R, J. Electrochem. Soc., 138, 1939 (1991)

[14] Atkins PW, General Chemistry, p. 927, W.H. Freeman and Company, New York (1989)

[15] Deakin MR, Buttry DA, Anal. Chem., 61, 1147 (1989)

[16] Zhitomirsky I, Kohn A, Gal-Or L, Mater. Lett., 25, 223 (1995)

[17] Nyquist RA, Kagel RO, Handbook of Infrared and Raman Spectra of Inorganic Compounds and Organic Salts, Vol. 4, p. 223, Academic Press, Tokyo (1997)