Thermoelectric materials are one potential technology that could be used for energy harvesting. Here we report results from nanoscale Ge/SiGe heterostructure materials grown on Si substrates designed to enhance the thermoelectric performance over bulk materials at room temperature. The materials and devices are aimed at integrated energy harvesters for autonomous sensing applications. We report Seebeck coefficients up to 279.5 +/- 1.2 mu V/K at room temperature with electrical conductivities of 77,200 S/m which produce a high power factor of 6.02 +/- 0.05 mW m(-1) K-2 and a ZT of 0.135 +/- 0.074 at room temperature. Methods for microfabricating modules will be described along with the first demonstration of power output from flip-chip bonded SiGe legs. (C) 2014 Elsevier Ltd. All rights reserved.