Planar Indium Gallium Arsenide (InGaAs) Gunn diodes with on chip matching circuits have been fabricated on a semi-insulating Indium Phosphide (InP) substrate to enable the extraction of the second harmonic in millimeter-wave and terahertz frequencies. The planar Gunn diodes were designed in coplanar waveguide (CPW) format with an active channel length of 4 mu m and width 120 mu m integrated to CPW matching circuit and radial stub resonator to suppress the fundamental and to extract the second harmonic. The initial experimental measurements have given a second harmonic signal at 118 GHz with an output power of -20 dBm and the fundamental signal at 59 GHz was suppressed to the noise level of the experimental set-up. (C) 2014 Elsevier Ltd. All rights reserved.