LiPON films are prepared by Radio Frequency sputtering on 200 mm silicon wafers. LiPON elemental composition is investigated by RBS and NRA. Ionic conductivity is measured by impedance spectroscopy and electronic conductivity from Isothermal Transient Ionic Current (ITIC) in the temperature range 80 K-380 K on MIM cells. The ionic and electronic conductivities at room temperature are 1.2 x 10(-6) S/cm and 8 x 10(-14) S/cm respectively. Charge carrier concentration, mobility and Li ion diffusion coefficient are calculated. Temperature dependence of conduction mechanism in LiPON is described. (C) 2013 Elsevier B.V. All rights reserved.