We investigate local electronic properties of cadmium telluride solar cells using electron beam induced current (EBIC) measurements with patterned contacts. EBIC measurements are performed with a spatial resolution as high as approximate to 20 nm both on the top surface and throughout the cross-section of the device, revealing a remarkable degree of electrical inhomogeneity near the p-n junction and enhanced carrier collection in the vicinity of grain boundaries (GB). Simulation results of low energy EBIC suggest that the band bending near a GB is downward, with a magnitude of at least 0.2 eV for the most effective current-collecting GBs. Furthermore, we demonstrate a new approach to investigate local open-circuit voltage by applying an external bias across electrical contact with a point electron-beam injection. The length scale of the nanocontacts is on the length scale of a single or a few grains, confining current path with highly localized photo-generated carriers. (C) 2013 Elsevier B.V. All rights reserved.