Polycrystalline CuIn0 7Ga0 Se-3(2) thin films were prepared on soda-lime glass substrates using pulsed laser deposition (PLD) with various process par meters such as laser energy, repetition rate and substrate temperature It was confirmed that there existed a limited laser energy, 1 e less than 300 mJ, to get phase pure CIGS thin films at room temperature Particularly, even at room temperature, distinct crystalline CIGS phase was observed in the films Crystallinity of the films improved with increasing substrate temperature as evidenced by the decrease of FWHM from 0 65 degrees to 0 54 degrees Slightly Cu-rich surface with Cu2-xSe phase was confirmed to exist by Raman spectra, depending on substrate temperature Improved electrical properties, ie, carrier concentration of similar to 10(18) cm(-3) and resistivity of 10(-1) Omega cm at higher substrate temperature for the optimal CIGS films are assumed to be induced by the potential contributions from highly crystallized thin films, existence of Cu2-xSe phase and diffusion of Na from substrates to films (C) 2010 Elsevier Ltd All rights reserved