An in-line and low cost doping procedure has been optimized, suitable of implementation on thin wafers and based on organic and aqueous diluted precursors instead of the traditional POCl3 process, which results in a safer and environmentally friendly process. The influence of the liquid precursor solution in the effective lifetime and the phosphorous depth profile has been studied, along with the potential introduction of trace contaminants. (C) 2014 Elsevier Ltd. All rights reserved.