This study is focused on the evaluation of resistance of plasma polymers toward common sterilization techniques, i.e. property important for possible use of such materials in biomedical applications. Three kinds of plasma polymers having different bioadhesive natures were studied: plasma polymerized poly(ethylene oxide), fluorocarbon plasma polymers, and nitrogen-rich plasma polymers. These plasma polymers were subjected to dry heat, autoclave and UV radiation treatment. Their physical, chemical and bioresponsive properties were determined by means of different techniques (ellipsometry, atomic force microscopy, wettability measurements, X-ray photoelectron spectroscopy and biological tests with osteoblast-like cells MG63). The results clearly show that properties of thin films of plasma polymers may be significantly altered by a sterilization process. Moreover, observed changes induced by selected sterilization methods were found to depend strongly on the sterilized plasma polymer. (C) 2012 Elsevier B.V. All rights reserved.