Different electrical characteristics depending on the impedance matching conditions were observed in inductively coupled plasma during the E-H mode and H-E mode transition and their hysteresis. At the auto matching condition, there was no hysteresis loop on the E-H and H-E transition, while the hysteresis loop was clearly observed at the fixed matching condition. This result shows that the impedance matching condition is the primary cause for the hysteresis loop. (C) 2011 Published by Elsevier B.V.