화학공학소재연구정보센터
Thin Solid Films, Vol.523, 34-36, 2012
Control of electron energy distribution function by a rotating magnetic field
The effects of a rotating magnetic field (RMF) on the electron energy distribution function (EEDF) are studied with the aim of controlling the EEDF of radio-frequency (rf) inductively coupled plasmas. In order to obtain the EEDF correctly, the external filter and the reference electrode of the probe system are used to compensate for the effect of the rf (13.56 MHz) and the RMF (1.7-2.9 MHz) fluctuations of the plasma potential. With increasing RMF frequency, the high energy component of the EEDF increases. Space potential and effective electron temperature also tend to increase with increasing RMF frequency. (C) 2012 Elsevier B. V. All rights reserved.