Perhydropolysilazane (PHPS) conversion to silica through different low temperature routes has been studied. This study showed the influence of main conditions such as moisture and temperature on the conversion kinetics. Catalytic effects of ammonia both in solution and in the gas fraction and hydrogen peroxide were investigated. Possible conversion mechanisms in the presence of ammonia and peroxide catalysts are proposed, since both appear to play a significant role in the conversion of PHPS, although the effect is limited to the first conversion step. Barrier properties against water and oxygen shown by polymer films coated by thin inorganic layers obtained following these curing routes have then been compared using an innovative permeation measurement method. Oxygen and water permeability measurements show that the curing method has a noticeable effect on gas barrier efficiency. The most efficient barrier layers tested in this work led to a barrier improvement factor against oxygen of circa one order of magnitude. (C) 2012 Elsevier B. V. All rights reserved.