Carbon nanotube (CNT)/Ag/Al-doped zinc oxide (AZO) multilayer films are fabricated on a plastic substrate by using spraying and magnetron sputtering methods at room temperature. The electrical and optical properties of the transparent conductive CNT/Ag/AZO films are investigated. The introduction of Ag and AZO layer can smoothen the surface, and improve the conductivity and optical transmittance of the multilayer films. The Ag thickness is optimized by estimating the figure of merit of the films. The CNT/Ag/AZO films can maintain high conductivity and transmittance without obvious degradation during repeated bending. The results indicate that the multilayer films have potential applications in flexible optoelectronic devices. (c) 2012 Elsevier B.V. All rights reserved.