Thin Solid Films, Vol.526, 168-175, 2012
Structural and nanomechanical properties of a zeolite membrane measured using nanoindentation
Knowledge of the elastic constants of zeolite films is of great practical interest, due to its main applications. The structural and nanomechanical properties of a faujasite-type zeolite film have been measured using nanoindentation. The hardness and elastic moduli of the film are estimated from creep and non-creep nanoindentation measurements. The deformation mechanism was analyzed using a pile-up/sink-in analysis, revealing a switch of dominant deformation mechanism at similar to 250 nm of displacement. Wear analysis (hardness to elastic modulus ratio) provided information about the structural integrity and mechanical reliability of the film. Hardness and elastic modulus values were found to decrease with increasing penetration depth. In particular, the elastic modulus decreased from similar to 60 GPa (at displacement of 20-30 nm) to similar to 7 GPa (at displacement of 200 nm), and the hardness from similar to 8 GPa (at displacement of 20-30 nm) to similar to 0.8 GPa (at displacement of 500 nm). (c) 2012 Elsevier B.V. All rights reserved.