Molybdenum films are investigated on stainless steel substrates coated with polysilazane based sol-gel and SiOx layers for flexible CIGS solar cell applications. Thermal stability of the multilayer has been studied. The thickness of polysilazane films are significantly reduced (17%) after heat treatment suggesting a thermal degradation. Four different microstructures were found for Mo films by varying argon total pressure from 2.6x10 (1) Pa to 2.6 Pa. It was shown that continuous films, low sheet resistance (0.5 Omega/square) and well facetted grains can be achieved when Mo films are deposited on heated substrates at homologous temperature, T of 0.2. (C) 2013 Elsevier B.V. All rights reserved.