Special issue on "Current Trends in Optical and X-Ray Metrology of Advanced Materials for Nanoscale Devices III", E-MRS Spring 2012-Symposium W, held in Strasbourg, France, May 14-18, 2012

Modreanu M; Durand O; Jellison GE; Salviati G; Fried M

Thin Solid Films, Vol.541, 1-2, 2013

DOI10.1016/j.tsf.2013.07.027 Export Citation

Special issue on "Current Trends in Optical and X-Ray Metrology of Advanced Materials for Nanoscale Devices III", E-MRS Spring 2012-Symposium W, held in Strasbourg, France, May 14-18, 2012

Modreanu M, Durand O, Jellison GE, Salviati G, Fried M