Micro Raman scattering experiments are carried out in pursuit of subtle but discernable signals from nano-diamond and beta-SiC thin films. The thin films are synthesized using microwave plasma assisted chemical vapor deposition technique. Raman scattering experiments in conjunction with scanning electron microscopy and x-ray diffraction were carried out to extract microstructure and phase information of the above mentioned thin films. Certain subtle Raman signals have been identified in this work. In the case of nanodiamond thin films, Raman bands at similar to 485 and similar to 1220 cm(-1) are identified. These bands have been assigned to the nanodiamond present in nanodiamond thin films. In the case of nano beta-SiC thin films, optical phonons are identified using surface enhanced Raman scattering. (C) 2013 Elsevier B.V. All rights reserved.