The magnetic anisotropy of Fe thin films grown on Si(111) was controlled by either oblique deposition of Fe or using an intermediate layer between the Fe film and Si substrate. By 45 degrees and 65 degrees off-normal deposition of Fe, a clear uniaxial magnetic anisotropy was observed in Pd capped Fe/Si(111) films. This uniaxial magnetic anisotropy dominated the magnetic switching behavior, as well as the magnetic hysteresis loops. In contrast to Fe/Si(111) and Fe/Pd-Si/Si(111), a 600 degrees C-annealed Fe-Si intermediate layer enhanced the coercivity (H-c) of the Fe film from 4 x 10(3) to 10 x 10(3) A/m. The simple methods of oblique deposition and suitable intermediate layer modulated the magnetic behavior of magnetic Fe thin films on Si(111) and are valuable for future applications. (C) 2013 Elsevier B.V. All rights reserved.