We report on the hydrothermal growth of high quality arrays of single crystalline zinc oxide (ZnO) nanocolumns, oriented perpendicularly to the transparent conductive oxide substrate. In order to obtain precisely defined spacing and arrangement of ZnO nanocolumns over an area up to 0.5 cm(2), we used electron beam lithography. Vertically aligned ZnO (multicrystalline or single crystals) nanocolumns were grown in an aqueous solution of zinc nitrate hexahydrate and hexamethylenetetramine at 95 degrees C, with a growth rate 0.5 divided by 1 mu m/h. Themorphology of the nanostructures was visualized by scanning electron microscopy. Such nanostructured ZnO films were used as a substrate for the recently developed 3-dimensional thin film silicon (amorphous, microcrystalline) solar cell, with a high efficiency potential. The photoelectrical and optical properties of the ZnO nanocolumns and the silicon absorber layers of these type nanostructured solar cells were investigated in details. (C) 2013 Elsevier B.V. All rights reserved.