Perhydropolysilazane (PHPS) conversion to silica through high energy ultraviolet irradiation has been studied. Precursor conversion speed and structural properties of the UV cured PHPS have been investigated and showed that this conversion method is fast but that complete conversion into silica is not achieved in an oxygen depleted atmosphere for layer thicknesses higher than 30 nm, resulting in a composite structure with concentration gradients. We further show that Fourier transform infrared spectroscopy data allow investigating the local structure and composition over the depth of the obtained layers. Gas permeability of the thin UV cured PHPS layers deposited on polymers has been studied. We used a high sensitivity permeation measurement technique to determine water vapor and oxygen permeabilities of the barrier layers and show the correlation between helium, oxygen and water permeability of these materials. Oxygen and water vapor transmission rates of respectively 0.06 cm(3)/m(2)/day/bar and 0.2 g/m(2)/day have been obtained with layers deposited on a polymer substrate. (C) 2013 Elsevier B. V. All rights reserved.