Deposition and structural characterization of SmxSyOz-based thin films are reported. The chemical synthesis of the SmxSyOz compounds is performed by thermolysis of dithiocarbamate precursors, followed by the drop casting deposition of the synthesized material, and by the thermal treatment at different temperatures (250 degrees C, 500 degrees C and 900 degrees C) and atmospheric conditions (nitrogen and air). Structural and morphological properties have been investigated by scanning electron microscopy, transmission electron microscopy and X-ray diffraction, and were found to depend closely on the treatment conditions. In particular, the treatment at temperatures as high as 900 degrees C and in a nitrogen atmosphere enhances the crystalline nature of the films and increases the samarium content in comparison to the oxygen content. Therefore, the temperature of 900 degrees C and the nitrogen atmosphere represent the optimal treatment conditions, among the process parameters, to obtain a single phase of Sm2SO2. (C) 2014 Elsevier B.V. All rights reserved.