Preparation and application possibilities for thin film model systems of isolated pure oxides and mixed oxide systems are reviewed. Vacuum deposition of oxides on NaCl(001) growth templates or post-oxidation of initially prepared metal particles almost exclusively led to well-structured and -defined systems, which are perfect starting systems for in-depth structural, compositional and property characterization. The advantages of the chosen preparation pathways are exemplarily discussed for a number of case studies, showing the full range of application possibilities, including easy and reproducible preparation of oxide nanoarchitectures, studies of detailed monitoring of phase transformations in oxide systems and more complex applications such as the influence of the oxide's properties on intermetallic formation in supported metal/oxide systems or the preparation of mixed oxide model systems with defined morphology and structure. Particular emphasis is placed on how structural characterization (high-resolution transmission electron microscopy, atomic force microscopy), spectroscopic methods (X-ray photoelectron spectroscopy) and kinetic measurements can be successfully combined to result in unambiguous structure-activity/selectivity and property relationships, leading to an in-depth understanding of the participating oxide structures on an atomic and molecular level. (C) 2014 Elsevier B.V. All rights reserved.